Inventor
SONG CHANG-LYONG
KR6 patents
Patents
6 patentsUS6638855B1Oct 28, 2003
Method of filling contact hole of semiconductor device
SAMSUNG ELECTRONICS CO LTD73 citations93
US6399552B1Jun 4, 2002
Aqueous cleaning solution for removing contaminants surface of circuit substrate cleaning method using the same
SAMSUNG ELECTRONICS CO LTD40 citations92
US5234864AAug 10, 1993
Method for interconnecting layers in a semiconductor device using two etching gases
SAMSUNG ELECTRONICS CO LTD23 citations92
US6406967B1Jun 18, 2002
Method for manufacturing cylindrical storage electrode of semiconductor device
SAMSUNG ELECTRONICS CO LTD28 citations91
US6162671ADec 19, 2000
Method of forming capacitors having high dielectric constant material
SAMSUNG ELECTRONICS CO LTD25 citations91
US7105474B2Sep 12, 2006
Organic stripping composition and method of etching oxide using the same
SAMSUNG ELECTRONICS CO LTD0 citations52