Inventor
OGATA TARO
JP6 patents
Patents
6 patentsUS6268904B1Jul 31, 2001
Optical exposure apparatus and photo-cleaning method
NIKON CORP146 citations98
US6411368B1Jun 25, 2002
Projection exposure method, projection exposure apparatus, and methods of manufacturing and optically cleaning the exposure apparatus
NIKON CORP53 citations94
US6642994B2Nov 4, 2003
Optical exposure apparatus and photo-cleaning method
NIKON CORP19 citations92
US6538722B2Mar 25, 2003
Projection exposure method, projection exposure apparatus, and methods of manufacturing and optically cleaning the exposure apparatus
NIKON CORP21 citations91
US6961114B2Nov 1, 2005
Optical apparatus and exposure apparatus incorporating the apparatus
NIKON CORP12 citations83
US6492649B1Dec 10, 2002
Projection exposure apparatus, projection exposure method, optical cleaning method and method of fabricating semiconductor device
NIKON CORP18 citations83