Inventor
FORSTER JOHN
US37 patents
⚠️ This page may combine multiple inventors who share the name “FORSTER JOHN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
26 patentsUS6344419B1Feb 5, 2002
Pulsed-mode RF bias for sidewall coverage improvement
APPLIED MATERIALS INC180 citations99
US6306265B1Oct 23, 2001
High-density plasma for ionized metal deposition capable of exciting a plasma wave
APPLIED MATERIALS INC138 citations99
US6217721B1Apr 17, 2001
Filling narrow apertures and forming interconnects with a metal utilizing a crystallographically oriented liner layer
APPLIED MATERIALS INC206 citations99
US5962923AOct 5, 1999
Semiconductor device having a low thermal budget metal filling and planarization of contacts, vias and trenches
APPLIED MATERIALS INC142 citations99
US5897752AApr 27, 1999
Wafer bias ring in a sustained self-sputtering reactor
APPLIED MATERIALS INC186 citations99
US6264812B1Jul 24, 2001
Method and apparatus for generating a plasma
APPLIED MATERIALS INC98 citations98
US6193855B1Feb 27, 2001
Use of modulated inductive power and bias power to reduce overhang and improve bottom coverage
APPLIED MATERIALS INC125 citations98
US6673724B2Jan 6, 2004
Pulsed-mode RF bias for side-wall coverage improvement
APPLIED MATERIALS INC49 citations96
US6368469B1Apr 9, 2002
Coils for generating a plasma and for sputtering
APPLIED MATERIALS INC48 citations96
US6297595B1Oct 2, 2001
Method and apparatus for generating a plasma
APPLIED MATERIALS INC76 citations96
US6228229B1May 8, 2001
Method and apparatus for generating a plasma
APPLIED MATERIALS INC74 citations96
US6136095AOct 24, 2000
Apparatus for filling apertures in a film layer on a semiconductor substrate
APPLIED MATERIALS INC52 citations96
US5763851AJun 9, 1998
Slotted RF coil shield for plasma deposition system
APPLIED MATERIALS INC93 citations96
US6176981B1Jan 23, 2001
Wafer bias ring controlling the plasma potential in a sustained self-sputtering reactor
APPLIED MATERIALS INC21 citations93
US5685941ANov 11, 1997
Inductively coupled plasma reactor with top electrode for enhancing plasma ignition
APPLIED MATERIALS INC62 citations93
US7569125B2Aug 4, 2009
Shields usable with an inductively coupled plasma reactor
APPLIED MATERIALS INC16 citations92
US7041201B2May 9, 2006
Sidewall magnet improving uniformity of inductively coupled plasma and shields used therewith
APPLIED MATERIALS INC31 citations92
US6783639B2Aug 31, 2004
Coils for generating a plasma and for sputtering
APPLIED MATERIALS INC21 citations92
US6313027B1Nov 6, 2001
Method for low thermal budget metal filling and planarization of contacts vias and trenches
APPLIED MATERIALS INC33 citations92
US7658802B2Feb 9, 2010
Apparatus and a method for cleaning a dielectric film
APPLIED MATERIALS INC8 citations84
US7704887B2Apr 27, 2010
Remote plasma pre-clean with low hydrogen pressure
APPLIED MATERIALS INC10 citations83
US10099245B2Oct 16, 2018
Process kit for deposition and etching
APPLIED MATERIALS INC2 citations73
US5516403AMay 14, 1996
Reversing orientation of sputtering screen to avoid contamination
APPLIED MATERIALS INC10 citations69
US12080519B2Sep 3, 2024
Smart dynamic load simulator for RF power delivery control system
APPLIED MATERIALS INC0 citations60
US11170982B2Nov 9, 2021
Methods and apparatus for producing low angle depositions
APPLIED MATERIALS INC0 citations49
US12205791B2Jan 21, 2025
Rating substrate support assemblies based on impedance circuit electron flow using machine learning
APPLIED MATERIALS INC0 citations44
DOW AGROSCIENCES LLC
6 patentsUS9914930B2Mar 13, 2018
FAD3 performance loci and corresponding target site specific binding proteins capable of inducing targeted breaks
DOW AGROSCIENCES LLC6 citations82
US10526610B2Jan 7, 2020
FAD3 performance loci and corresponding target site specific binding proteins capable of inducing targeted breaks
DOW AGROSCIENCES LLC3 citations72
US10640779B2May 5, 2020
Engineered transgene integration platform (ETIP) for gene targeting and trait stacking
DOW AGROSCIENCES LLC2 citations70
US10961540B2Mar 30, 2021
FAD3 performance loci and corresponding target site specific binding proteins capable of inducing targeted breaks
DOW AGROSCIENCES LLC0 citations61
US10577616B2Mar 3, 2020
FAD2 performance loci and corresponding target site specific binding proteins capable of inducing targeted breaks
DOW AGROSCIENCES LLC0 citations51
US9963711B2May 8, 2018
FAD2 performance loci and corresponding target site specific binding proteins capable of inducing targeted breaks
DOW AGROSCIENCES LLC0 citations51