Inventor

MUN CHANG-SUP

KR10 patents

⚠️ This page may combine multiple inventors who share the name “MUN CHANG-SUP”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SAMSUNG ELECTRONICS CO LTD

6 patents

US7344999B2Mar 18, 2008

Method for cleaning substrate having exposed silicon and silicon germanium layers and related method for fabricating semiconductor device

SAMSUNG ELECTRONICS CO LTD7 citations73

US7745338B2Jun 29, 2010

Method of forming fine pitch hardmask patterns and method of forming fine patterns of semiconductor device using the same

SAMSUNG ELECTRONICS CO LTD7 citations71

US7435301B2Oct 14, 2008

Cleaning solution of silicon germanium layer and cleaning method using the same

SAMSUNG ELECTRONICS CO LTD6 citations62

US7309683B2Dec 18, 2007

Cleaning composition and method of cleaning a semiconductor device using the same

SAMSUNG ELECTRONICS CO LTD4 citations62

US10910237B2Feb 2, 2021

Operating method for wet etching system and related system

SAMSUNG ELECTRONICS CO LTD1 citations61

US7354868B2Apr 8, 2008

Methods of fabricating a semiconductor device using a dilute aqueous solution of an ammonia and peroxide mixture

SAMSUNG ELECTRONICS CO LTD4 citations61

KIM HYO-JUNG

1 patent

US8822287B2Sep 2, 2014

Methods of manufacturing semiconductor devices

KIM HYO-JUNG7 citations82

CHOI SUK-HUN

1 patent

US8580648B2Nov 12, 2013

Capacitor having an electrode structure, method of manufacturing a capacitor having an electrode structure and semiconductor device having an electrode structure

CHOI SUK-HUN8 citations82

KWON DOO-WON

1 patent

US8058180B2Nov 15, 2011

Methods of fabricating a semiconductor device using a dilute aqueous solution of an ammonia and peroxide mixture

KWON DOO-WON0 citations47

HWANG KI-HYUN

1 patent

US8592269B2Nov 26, 2013

Method of manufacturing gate structure and method of manufacturing semiconductor device including the same

HWANG KI-HYUN0 citations45