Inventor
AN GEUN-SOO
KR4 patents
Patents
4 patentsUS7393159B2Jul 1, 2008
Inline transfer system and method
SAMSUNG ELECTRONICS CO LTD27 citations89
US7042553B2May 9, 2006
Apparatus for conveying substrates
SAMSUNG ELECTRONICS CO LTD19 citations80
US7134222B2Nov 14, 2006
Transfer apparatus
SAMSUNG ELECTRONICS CO LTD9 citations69
US7447559B2Nov 4, 2008
Apparatus and method of forming a photoresist pattern, and repair nozzle
SAMSUNG ELECTRONICS CO LTD2 citations58