Inventor
LUDVIKSSON AUDUNN
US16 patents
⚠️ This page may combine multiple inventors who share the name “LUDVIKSSON AUDUNN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
12 patentsUS6586330B1Jul 1, 2003
Method for depositing conformal nitrified tantalum silicide films by thermal CVD
TOKYO ELECTRON LTD127 citations98
US6894769B2May 17, 2005
Monitoring erosion of system components by optical emission
TOKYO ELECTRON LTD60 citations96
US6806949B2Oct 19, 2004
Monitoring material buildup on system components by optical emission
TOKYO ELECTRON LTD64 citations96
US7591923B2Sep 22, 2009
Apparatus and method for use of optical system with a plasma processing system
TOKYO ELECTRON LTD31 citations92
US7064812B2Jun 20, 2006
Method of using a sensor gas to determine erosion level of consumable system components
TOKYO ELECTRON LTD24 citations92
US7781340B2Aug 24, 2010
Method and system for etching high-k dielectric materials
TOKYO ELECTRON LTD12 citations84
US7202169B2Apr 10, 2007
Method and system for etching high-k dielectric materials
TOKYO ELECTRON LTD14 citations84
US7102132B2Sep 5, 2006
Process monitoring using infrared optical diagnostics
TOKYO ELECTRON LTD15 citations84
US7214327B2May 8, 2007
Anisotropic dry etching of Cu-containing layers
TOKYO ELECTRON LTD8 citations74
US10147613B2Dec 4, 2018
Neutral beam etching of Cu-containing layers in an organic compound gas environment
TOKYO ELECTRON LTD2 citations73
US7355171B2Apr 8, 2008
Method and apparatus for process monitoring and control
TOKYO ELECTRON LTD7 citations73
US7553427B2Jun 30, 2009
Plasma etching of Cu-containing layers
TOKYO ELECTRON LTD6 citations63