Inventor

SOCHA ROBERT

US7 patents

⚠️ This page may combine multiple inventors who share the name “SOCHA ROBERT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML MASKTOOLS BV

3 patents

US7292315B2Nov 6, 2007

Optimized polarization illumination

ASML MASKTOOLS BV17 citations91

US7864301B2Jan 4, 2011

Source and mask optimization by changing intensity and shape of the illumination source

ASML MASKTOOLS BV19 citations90

US7710544B2May 4, 2010

Optimized polarization illumination

ASML MASKTOOLS BV2 citations61

SOCHA ROBERT

2 patents

US8730452B2May 20, 2014

Source and mask optimization by changing intensity and shape of the illumination source and magnitude and phase of mask diffraction orders

SOCHA ROBERT5 citations79

US8395757B2Mar 12, 2013

Optimized polarization illumination

SOCHA ROBERT1 citations58

ZAMBROWICZ MICHAEL J

1 patent

US9080282B2Jul 14, 2015

Laundry moisture sensing, control, diagnostic and method

ZAMBROWICZ MICHAEL J4 citations67

ASML NETHERLANDS BV

1 patent

US10657641B2May 19, 2020

Source and mask optimization by changing intensity and shape of the illumination source and magnitude and phase of mask diffraction orders

ASML NETHERLANDS BV0 citations49