Inventor
FLAGELLO DONIS
US8 patents
⚠️ This page may combine multiple inventors who share the name “FLAGELLO DONIS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
5 patentsUS6954256B2Oct 11, 2005
Gradient immersion lithography
ASML NETHERLANDS BV275 citations95
US6943941B2Sep 13, 2005
Stationary and dynamic radial transverse electric polarizer for high numerical aperture systems
ASML NETHERLANDS BV58 citations94
US7511884B2Mar 31, 2009
Stationary and dynamic radial transverse electric polarizer for high numerical aperture systems
ASML NETHERLANDS BV23 citations91
US7221501B2May 22, 2007
Stationary and dynamic radial transverse electric polarizer for high numerical aperture systems
ASML NETHERLANDS BV28 citations91
US7113259B2Sep 26, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations37