Inventor
SCHOEN FLORIAN
DE18 patents
⚠️ This page may combine multiple inventors who share the name “SCHOEN FLORIAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INFINEON TECHNOLOGIES AG
9 patentsUS8049515B2Nov 1, 2011
Silicon MEMS resonators
INFINEON TECHNOLOGIES AG22 citations92
US7851925B2Dec 14, 2010
Wafer level packaged MEMS integrated circuit
INFINEON TECHNOLOGIES AG32 citations92
US7755367B2Jul 13, 2010
Silicon MEMS resonators
INFINEON TECHNOLOGIES AG17 citations92
US8040207B2Oct 18, 2011
MEMS resonator devices with a plurality of mass elements formed thereon
INFINEON TECHNOLOGIES AG8 citations83
US7889030B2Feb 15, 2011
Passive temperature compensation of silicon MEMS devices
INFINEON TECHNOLOGIES AG16 citations83
US7851875B2Dec 14, 2010
MEMS devices and methods of manufacture thereof
INFINEON TECHNOLOGIES AG2 citations63
US8049490B2Nov 1, 2011
Silicon MEMS resonator devices and methods
INFINEON TECHNOLOGIES AG2 citations62
US7612627B2Nov 3, 2009
Integrated binary phase shift keying with silicon MEMS resonators
INFINEON TECHNOLOGIES AG0 citations52
US8742873B2Jun 3, 2014
MEMS resonator devices
INFINEON TECHNOLOGIES AG0 citations51
SCHOEN FLORIAN
5 patentsUS8115573B2Feb 14, 2012
Resonance frequency tunable MEMS device
SCHOEN FLORIAN7 citations79
US8198690B2Jun 12, 2012
MEMS devices and methods of manufacture thereof
SCHOEN FLORIAN2 citations61
US9266719B2Feb 23, 2016
Methods of manufacture MEMS devices
SCHOEN FLORIAN0 citations51
US9083308B2Jul 14, 2015
MEMS device
SCHOEN FLORIAN0 citations47
US8703516B2Apr 22, 2014
MEMS substrates, devices, and methods of manufacture thereof
SCHOEN FLORIAN0 citations39