Inventor

OOURA MASAHIDE

JP2 patents

Patents

2 patents

US9837248B2Dec 5, 2017

Ion implantation apparatus and method of controlling ion implantation apparatus

SUMITOMO HEAVY INDUSTRIES ION TECH CO LTD0 citations46

US10825654B2Nov 3, 2020

Ion implantation apparatus and measurement device

SUMITOMO HEAVY INDUSTRIES ION TECH CO LTD0 citations35