P

Inventor

HIROSE YASUHISA

JP5 patents
⚠️ This page may combine multiple inventors who share the name “HIROSE YASUHISA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CKD CORP

3 patents
US11566723B2Jan 31, 2023

Flow path switching valve and manufacturing method therefor

CKD CORP0 citations60
US10907748B2Feb 2, 2021

Flow path switching valve and manufacturing method therefor

CKD CORP0 citations60
US11125342B2Sep 21, 2021

Spool valve

CKD CORP0 citations50

TOKYO ELECTRON LTD

2 patents
US9984908B2May 29, 2018

Temperature control system, semiconductor manufacturing device, and temperature control method

TOKYO ELECTRON LTD7 citations80
US10553463B2Feb 4, 2020

Temperature control system, semiconductor manufacturing device, and temperature control method

TOKYO ELECTRON LTD4 citations69