Inventor

HUEBNER PHILIPP

DE4 patents

⚠️ This page may combine multiple inventors who share the name “HUEBNER PHILIPP”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL AG

2 patents

US9989862B2Jun 5, 2018

Optical system for producing lithographic structures

ZEISS CARL AG2 citations70

US10310385B2Jun 4, 2019

Optical system for producing lithographic structures

ZEISS CARL AG1 citations60

ZEISS CARL SMT GMBH

2 patents

US11782088B2Oct 10, 2023

Devices, methods and sample holder for testing photonic integrated circuits and photonic integrated circuits

ZEISS CARL SMT GMBH0 citations59

US11946950B2Apr 2, 2024

Electro-optical circuit board for contacting photonic integrated circuits

ZEISS CARL SMT GMBH0 citations48