Inventor
CARPENTER PATRICK D
US3 patents
Patents
3 patentsUS9812400B1Nov 7, 2017
Contact line having insulating spacer therein and method of forming same
GLOBALFOUNDRIES INC19 citations90
US10049985B2Aug 14, 2018
Contact line having insulating spacer therein and method of forming same
GLOBALFOUNDRIES INC0 citations50
US10453751B2Oct 22, 2019
Tone inversion method and structure for selective contact via patterning
GLOBALFOUNDRIES INC0 citations38