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Inventor
TAKAICHI TETSUMASA
JP
3 patents
⚠️ This page may combine multiple inventors who share the name “TAKAICHI TETSUMASA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AZ ELECTRONIC MAT LUXEMBOURG SARL
1 patent
US11221558B2
Jan 11, 2022
Bottom antireflective coating forming composition
AZ ELECTRONIC MAT LUXEMBOURG SARL
0 citations
42
MERCK PATENT GMBH
1 patent
US11163233B2
Nov 2, 2021
Chemically amplified positive type photoresist composition and pattern forming method using the same
MERCK PATENT GMBH
0 citations
42
RIDGEFIELD ACQUISITION
1 patent
US11029599B2
Jun 8, 2021
Chemically amplified positive photoresist composition and pattern forming method using same
RIDGEFIELD ACQUISITION
0 citations
42