Inventor

KAWATO SHUNJI

JP5 patents

⚠️ This page may combine multiple inventors who share the name “KAWATO SHUNJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AZ ELECTRONIC MAT LUXEMBOURG SARL

3 patents

US11221558B2Jan 11, 2022

Bottom antireflective coating forming composition

AZ ELECTRONIC MAT LUXEMBOURG SARL0 citations42

US10875969B2Dec 29, 2020

Composition for forming coating film and method for forming coating film using same

AZ ELECTRONIC MAT LUXEMBOURG SARL0 citations38

US10513632B2Dec 24, 2019

Film-forming composition and film-forming method using same

AZ ELECTRONIC MAT LUXEMBOURG SARL0 citations36

MERCK PATENT GMBH

1 patent

US11163233B2Nov 2, 2021

Chemically amplified positive type photoresist composition and pattern forming method using the same

MERCK PATENT GMBH0 citations42

RIDGEFIELD ACQUISITION

1 patent

US11029599B2Jun 8, 2021

Chemically amplified positive photoresist composition and pattern forming method using same

RIDGEFIELD ACQUISITION0 citations42