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Inventor
CHIOU SHIN-FU
TW
2 patents
Patents
2 patents
US6700093B2
Mar 2, 2004
Dielectric barrier discharge apparatus and module for perfluorocompound abatement
IND TECH RES INST
10 citations
66
US7472023B2
Dec 30, 2008
Gas analysis system and method
IND TECH RES INST
3 citations
53