Inventor · disambiguated record
Toshihito Tsuga
Also filed as: TSUGA TOSHIHITO
2 granted patents·3 pending applications·8 citations·filing 2001–2005
51Inventor score
Top patents by PatentIndex Score
5 records- 0154US6946036B2Method and device for removing particles on semiconductor wafersTEXAS INSTRUMENTS INC·Filed 2002·Granted Sep 20, 2005·7 cites·10 claims
- 0247US6973934B2Method for removing particles on semiconductor wafersTEXAS INSTRUMENTS INC·Filed 2002·Granted Dec 13, 2005·1 cites·16 claims
- 0336US2005233554A1Manufacturing method for semiconductor device and semiconductor manufacturing apparatusTSUGA TOSHIHITO·Filed 2005·Application pending·0 cites
- 0428US2003041876A1Method and device for removing particles on semiconductor wafersFiled 2002·Application pending·0 cites
- 0523US2002083961A1Method and apparatus for cleaning semiconductor waferFiled 2001·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →