Inventor
STEVENS HARRIE J
US10 patents
Patents
10 patentsUS5622540AApr 22, 1997
Method for breaking a glass sheet
CORNING INC223 citations98
US5776220AJul 7, 1998
Method and apparatus for breaking brittle materials
CORNING INC325 citations97
US6465272B1Oct 15, 2002
Extreme ultraviolet soft x-ray projection lithographic method and mask devices
CORNING INC65 citations95
US6576380B2Jun 10, 2003
Extreme ultraviolet soft x-ray projection lithographic method and mask devices
CORNING INC31 citations92
US6375551B1Apr 23, 2002
Angstrom polishing of calcium fluoride optical VUV microlithography lens elements and preforms
CORNING INC28 citations90
US6388745B2May 14, 2002
Detecting inclusions in transparent sheets
CORNING INC14 citations82
US6322425B1Nov 27, 2001
Colloidal polishing of fused silica
CORNING INC9 citations73
US6159077ADec 12, 2000
Colloidal silica polishing abrasive
CORNING INC10 citations73
US7229927B1Jun 12, 2007
Semiconductor processing silica soot abrasive slurry method for integrated circuit microelectronics
CORNING INC3 citations61
US6616718B2Sep 9, 2003
Aqueous solution for colloidal polishing of silicate substrates
CORNING INC0 citations51