Inventor
XIAOYU MI
JP6 patents
⚠️ This page may combine multiple inventors who share the name “XIAOYU MI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FUJITSU LTD
5 patentsUS7161274B2Jan 9, 2007
Micro-oscillation element having two rotational axes that are non-orthogonal to each other
FUJITSU LTD30 citations92
US7550895B2Jun 23, 2009
Method for driving micro-oscillating element having comb-teeth electrodes
FUJITSU LTD13 citations84
US7262541B2Aug 28, 2007
Micro-oscillation element incorporating springs
FUJITSU LTD9 citations73
US7701155B2Apr 20, 2010
Method for driving micro-oscillating element having comb-teeth electrodes
FUJITSU LTD2 citations62
US7192879B2Mar 20, 2007
Method for manufacturing micro-structural unit
FUJITSU LTD0 citations52