Inventor
LA MAGNA LUIGI
IT3 patents
Patents
3 patentsUS7193256B2Mar 20, 2007
Manufacturing method for a semiconductor substrate comprising at least a buried cavity and devices formed with this method
ST MICROELECTRONICS SRL14 citations81
US7585743B2Sep 8, 2009
Manufacturing method for a semiconductor substrate comprising at least a buried cavity and devices formed with this method
ST MICROELECTRONICS SRL7 citations71
US7892693B2Feb 22, 2011
Fuel cell planarly integrated on a monocrystalline silicon chip and process of fabrication
ST MICROELECTRONICS SRL1 citations44