Inventor
ASANO MITSUYO
JP6 patents
⚠️ This page may combine multiple inventors who share the name “ASANO MITSUYO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
3 patentsUS6335129B1Jan 1, 2002
Method for repairing pattern defect, photo mask using the method, and semiconductor device manufacturing method employing the photo mask
TOSHIBA KK70 citations94
US7673281B2Mar 2, 2010
Pattern evaluation method and evaluation apparatus and pattern evaluation program
TOSHIBA KK21 citations92
US7313781B2Dec 25, 2007
Image data correction method, lithography simulation method, image data correction system, program, mask and method of manufacturing a semiconductor device
TOSHIBA KK14 citations83