Inventor
TANASE YOSHIAKI
US9 patents
⚠️ This page may combine multiple inventors who share the name “TANASE YOSHIAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS5685914ANov 11, 1997
Focus ring for semiconductor wafer processing in a plasma reactor
APPLIED MATERIALS INC516 citations98
US7207766B2Apr 24, 2007
Load lock chamber for large area substrate processing system
APPLIED MATERIALS INC69 citations97
US7652223B2Jan 26, 2010
Electron beam welding of sputtering target tiles
APPLIED MATERIALS INC17 citations83
US7282097B2Oct 16, 2007
Slit valve door seal
APPLIED MATERIALS INC17 citations79
US7651315B2Jan 26, 2010
Large area substrate transferring method for aligning with horizontal actuation of lever arm
APPLIED MATERIALS INC5 citations73
US7575220B2Aug 18, 2009
Curved slit valve door
APPLIED MATERIALS INC4 citations61