Inventor
LEUNG BILLY C
US7 patents
⚠️ This page may combine multiple inventors who share the name “LEUNG BILLY C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
5 patentsUS7641247B2Jan 5, 2010
End effector assembly for supporting a substrate
APPLIED MATERIALS INC30 citations91
US7440091B2Oct 21, 2008
Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate
APPLIED MATERIALS INC16 citations89
US7575220B2Aug 18, 2009
Curved slit valve door
APPLIED MATERIALS INC4 citations61
US7834994B2Nov 16, 2010
Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate
APPLIED MATERIALS INC2 citations60
US9580956B2Feb 28, 2017
Methods and apparatus for providing a floating seal for chamber doors
APPLIED MATERIALS INC0 citations51