Inventor
BERKSTRESSER DAVID E
US20 patents
⚠️ This page may combine multiple inventors who share the name “BERKSTRESSER DAVID E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
9 patentsUS5565071AOct 15, 1996
Integrated sputtering target assembly
APPLIED MATERIALS INC126 citations98
US5433835AJul 18, 1995
Sputtering device and target with cover to hold cooling fluid
APPLIED MATERIALS INC115 citations98
US5611865AMar 18, 1997
Alignment of a shadow frame and large flat substrates on a heated support
APPLIED MATERIALS INC116 citations97
US5487822AJan 30, 1996
Integrated sputtering target assembly
APPLIED MATERIALS INC106 citations97
US5603816AFeb 18, 1997
Sputtering device and target with cover to hold cooling fluid
APPLIED MATERIALS INC91 citations95
US5595337AJan 21, 1997
Sputtering device and target with cover to hold cooling fluid
APPLIED MATERIALS INC44 citations95
US6746198B2Jun 8, 2004
Substrate transfer shuttle
APPLIED MATERIALS INC42 citations93
US7575220B2Aug 18, 2009
Curved slit valve door
APPLIED MATERIALS INC4 citations61
US9580956B2Feb 28, 2017
Methods and apparatus for providing a floating seal for chamber doors
APPLIED MATERIALS INC0 citations51