Inventor
HON MELITTA MANYIN
US4 patents
Patents
4 patentsUS10090147B2Oct 2, 2018
Integrated system and method for source/drain engineering
APPLIED MATERIALS INC6 citations82
US10504717B2Dec 10, 2019
Integrated system and method for source/drain engineering
APPLIED MATERIALS INC0 citations51
US9653282B2May 16, 2017
Silicon-containing substrate cleaning procedure
APPLIED MATERIALS INC0 citations49
US9472416B2Oct 18, 2016
Methods of surface interface engineering
APPLIED MATERIALS INC0 citations39