Inventor
BRUNNER TIMOTHY ALLAN
US10 patents
⚠️ This page may combine multiple inventors who share the name “BRUNNER TIMOTHY ALLAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
8 patentsUS5805290ASep 8, 1998
Method of optical metrology of unresolved pattern arrays
IBM209 citations96
US6436605B1Aug 20, 2002
Plasma resistant composition and use thereof
IBM31 citations92
US5948571ASep 7, 1999
Asymmetrical resist sidewall
IBM23 citations87
US7074525B2Jul 11, 2006
Critical dimension control of printed features using non-printing fill patterns
IBM11 citations78
US10012898B2Jul 3, 2018
EUV mask for monitoring focus in EUV lithography
IBM4 citations72
US9588440B2Mar 7, 2017
Method for monitoring focus in EUV lithography
IBM3 citations72
US6114096ASep 5, 2000
Asymmetrical resist sidewall
IBM13 citations68
US9921466B2Mar 20, 2018
Method for monitoring focus in EUV lithography
IBM0 citations51