Inventor
JEONG HEE JONG
KR3 patents
Patents
3 patentsUS10971335B2Apr 6, 2021
Radio frequency (RF) power monitoring device and plasma enhanced (PE) system including the same
SAMSUNG ELECTRONICS CO LTD7 citations78
US11233494B2Jan 25, 2022
Electronic circuit for filtering signal received from plasma chamber
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US10208397B2Feb 19, 2019
Apparatus for depositing a thin film
SAMSUNG ELECTRONICS CO LTD0 citations36