Inventor
MOPIDEVI HEMA SWAROOP
US7 patents
Patents
7 patentsUS10354838B1Jul 16, 2019
RF antenna producing a uniform near-field Poynting vector
LAM RES CORP27 citations93
US10685810B2Jun 16, 2020
RF antenna producing a uniform near-field Poynting vector
LAM RES CORP12 citations84
US12283462B2Apr 22, 2025
Control of plasma formation by RF coupling structures
LAM RES CORP2 citations69
US12237155B2Feb 25, 2025
Magnetic shielding for plasma sources
LAM RES CORP0 citations61
US11177067B2Nov 16, 2021
Magnetic shielding for plasma sources
LAM RES CORP1 citations61
US10460914B2Oct 29, 2019
Ferrite cage RF isolator for power circuitry
LAM RES CORP0 citations39
US10812033B2Oct 20, 2020
High-power radio-frequency spiral-coil filter
LAM RES CORP0 citations36