Inventor
MOSSAVAT SEYED IMAN
NL13 patents
Patents
13 patentsUS10627213B2Apr 21, 2020
Statistical hierarchical reconstruction from metrology data
ASML NETHERLANDS BV2 citations71
US10901323B2Jan 26, 2021
Metrology method and apparatus with increased bandwidth
ASML NETHERLANDS BV0 citations62
US10369752B2Aug 6, 2019
Metrology method and apparatus, computer program and lithographic system
ASML NETHERLANDS BV1 citations61
US11392043B2Jul 19, 2022
Method and metrology apparatus for determining estimated scattered radiation intensity
ASML NETHERLANDS BV0 citations60
US10996568B2May 4, 2021
Methods and apparatus for metrology
ASML NETHERLANDS BV1 citations60
US12204298B2Jan 21, 2025
Methods of modelling systems for performing predictive maintenance of systems, such as lithographic systems
ASML NETHERLANDS BV1 citations54
US10732514B2Aug 4, 2020
Metrology method and apparatus with increased bandwidth
ASML NETHERLANDS BV0 citations51
US11556060B2Jan 17, 2023
Method of calibrating a plurality of metrology apparatuses, method of determining a parameter of interest, and metrology apparatus
ASML NETHERLANDS BV0 citations48
US12591178B2Mar 31, 2026
Method for adjusting a patterning process
ASML NETHERLANDS BV0 citations42
US10156797B2Dec 18, 2018
Method of determining edge placement error, inspection apparatus, patterning device, substrate and device manufacturing method
ASML NETHERLANDS BV0 citations41
US10151985B2Dec 11, 2018
Process flagging and cluster detection without requiring reconstruction
ASML NETHERLANDS BV0 citations39
US9760018B2Sep 12, 2017
Method and inspection apparatus and computer program product for assessing a quality of reconstruction of a value of a parameter of interest of a structure
ASML NETHERLANDS BV0 citations39
US10429746B2Oct 1, 2019
Estimation of data in metrology
ASML NETHERLANDS BV0 citations37