Inventor
SRIVATSAN SRIDHARAN
US5 patents
Patents
5 patentsUS6896586B2May 24, 2005
Method and apparatus for heating polishing pad
LAM RES CORP26 citations89
US6475332B1Nov 5, 2002
Interlocking chemical mechanical polishing system
LAM RES CORP44 citations89
US7413988B1Aug 19, 2008
Method and apparatus for detecting planarization of metal films prior to clearing
LAM RES CORP6 citations70
US7690966B1Apr 6, 2010
Method and apparatus for detecting planarization of metal films prior to clearing
LAM RES CORP0 citations48
US7040952B1May 9, 2006
Method for reducing or eliminating de-lamination of semiconductor wafer film layers during a chemical mechanical planarization process
LAM RES CORP0 citations48