Inventor
RAMANUJAM KATGENHALLI Y
US3 patents
Patents
3 patentsUS6896586B2May 24, 2005
Method and apparatus for heating polishing pad
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US7413988B1Aug 19, 2008
Method and apparatus for detecting planarization of metal films prior to clearing
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US7690966B1Apr 6, 2010
Method and apparatus for detecting planarization of metal films prior to clearing
LAM RES CORP0 citations48