Inventor

NI TOM

US5 patents

⚠️ This page may combine multiple inventors who share the name “NI TOM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

4 patents

US6042687AMar 28, 2000

Method and apparatus for improving etch and deposition uniformity in plasma semiconductor processing

LAM RES CORP185 citations98

US6013155AJan 11, 2000

Gas injection system for plasma processing

LAM RES CORP294 citations98

US7413988B1Aug 19, 2008

Method and apparatus for detecting planarization of metal films prior to clearing

LAM RES CORP6 citations70

US7690966B1Apr 6, 2010

Method and apparatus for detecting planarization of metal films prior to clearing

LAM RES CORP0 citations48

NI TOM

1 patent

US8608851B2Dec 17, 2013

Plasma confinement apparatus, and method for confining a plasma

NI TOM7 citations76