Inventor
ZHU WEN H
US4 patents
Patents
4 patentsUS6699784B2Mar 2, 2004
Method for depositing a low k dielectric film (K>3.5) for hard mask application
APPLIED MATERIALS INC42 citations91
US7700486B2Apr 20, 2010
Oxide-like seasoning for dielectric low k films
APPLIED MATERIALS INC3 citations62
US7115508B2Oct 3, 2006
Oxide-like seasoning for dielectric low k films
APPLIED MATERIALS INC4 citations62
US7588803B2Sep 15, 2009
Multi step ebeam process for modifying dielectric materials
APPLIED MATERIALS INC3 citations61