Inventor
YU PI-CHUN
TW6 patents
⚠️ This page may combine multiple inventors who share the name “YU PI-CHUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
4 patentsUS12362203B2Jul 15, 2025
Method for etching etch layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11784065B2Oct 10, 2023
Method for etching etch layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12347692B2Jul 1, 2025
Wet bench process with in-situ pre-treatment operation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US10283384B2May 7, 2019
Method for etching etch layer and wafer etching apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48