Inventor
REUTER PAUL BENJAMIN
US5 patents
Patents
5 patentsUS12370573B2Jul 29, 2025
Equipment front end modules with induced gas mixing, and methods of use thereof
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US12564974B2Mar 3, 2026
Factory interface with redundancy
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US11511950B2Nov 29, 2022
Substrate flipping device
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US9464732B2Oct 11, 2016
Apparatus for uniform pumping within a substrate process chamber
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US12297691B2May 13, 2025
Seal mechanism for load port doors
APPLIED MATERIALS INC0 citations43