Inventor
ZAPKA WERNER
DE7 patents
⚠️ This page may combine multiple inventors who share the name “ZAPKA WERNER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
5 patentsUS4980536ADec 25, 1990
Removal of particles from solid-state surfaces by laser bombardment
IBM54 citations93
US5055383AOct 8, 1991
Process for making masks with structures in the submicron range
IBM24 citations91
US4855197AAug 8, 1989
Mask for ion, electron or X-ray lithography and method of making it
IBM48 citations89
US4578587AMar 25, 1986
Error-corrected corpuscular beam lithography
IBM15 citations72
US4724392AFeb 9, 1988
System for testing magnetic head/disk interfaces
IBM10 citations70