Inventor
CHEN J FUNG
US9 patents
⚠️ This page may combine multiple inventors who share the name “CHEN J FUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML MASKTOOLS BV
8 patentsUS6114071ASep 5, 2000
Method of fine feature edge tuning with optically-halftoned mask
ASML MASKTOOLS BV285 citations97
US6335130B1Jan 1, 2002
System and method of providing optical proximity correction for features using phase-shifted halftone transparent/semi-transparent features
ASML MASKTOOLS BV65 citations96
US6788400B2Sep 7, 2004
Method and apparatus for detecting aberrations in an optical system
ASML MASKTOOLS BV45 citations95
US6753954B2Jun 22, 2004
Method and apparatus for detecting aberrations in a projection lens utilized for projection optics
ASML MASKTOOLS BV59 citations95
US6312854B1Nov 6, 2001
Method of patterning sub-0.25 lambda line features with high transmission, “attenuated” phase shift masks
ASML MASKTOOLS BV44 citations94
US6482555B2Nov 19, 2002
Method of patterning sub-0.25λ line features with high transmission, “attenuated” phase shift masks
ASML MASKTOOLS BV21 citations91
US7026081B2Apr 11, 2006
Optical proximity correction method utilizing phase-edges as sub-resolution assist features
ASML MASKTOOLS BV10 citations73
US7399559B2Jul 15, 2008
Optical proximity correction method utilizing phase-edges as sub-resolution assist features
ASML MASKTOOLS BV4 citations60