Inventor
VOROBYEV YURI
US7 patents
⚠️ This page may combine multiple inventors who share the name “VOROBYEV YURI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MULTIMETRIXS LLC
3 patentsUS6989675B2Jan 24, 2006
Method and apparatus for precision measurement of film thickness
MULTIMETRIXS LLC59 citations94
US6891380B2May 10, 2005
System and method for measuring characteristics of materials with the use of a composite sensor
MULTIMETRIXS LLC21 citations91
US6815958B2Nov 9, 2004
Method and apparatus for measuring thickness of thin films with improved accuracy
MULTIMETRIXS LLC18 citations91