Inventor
ACHARYA NARASIMHA
US6 patents
⚠️ This page may combine multiple inventors who share the name “ACHARYA NARASIMHA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MATTSON TECH INC
5 patentsUS6951996B2Oct 4, 2005
Pulsed processing semiconductor heating methods using combinations of heating sources
MATTSON TECH INC84 citations97
US6849831B2Feb 1, 2005
Pulsed processing semiconductor heating methods using combinations of heating sources
MATTSON TECH INC135 citations97
US7317870B2Jan 8, 2008
Pulsed processing semiconductor heating methods using combinations of heating sources
MATTSON TECH INC46 citations95
US8000587B2Aug 16, 2011
Pulsed processing semiconductor heating methods and associated system using combinations of heating sources
MATTSON TECH INC17 citations91
US7037797B1May 2, 2006
Localized heating and cooling of substrates
MATTSON TECH INC27 citations86