Inventor · disambiguated record
Kazuya Sugawa
Also filed as: SUGAWA KAZUYA
2 granted patents·16 citations·filing 2002–2003
57Inventor score
Files withFUJITSU LTD2
Top patents by PatentIndex Score
2 records- 0163US7039889B2Apparatus, method, and program for designing a mask and method for fabricating semiconductor devicesFUJITSU LTD·Filed 2003·Granted May 2, 2006·11 cites·21 claims
- 0252US6800428B2Wavelength-independent exposure pattern generation method and exposure pattern generation system for lithographyFUJITSU LTD·Filed 2002·Granted Oct 5, 2004·5 cites·18 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →