Inventor

LIM KWON-TAEK

KR5 patents

⚠️ This page may combine multiple inventors who share the name “LIM KWON-TAEK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LEE HYO-SAN

3 patents

US8790470B2Jul 29, 2014

Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods

LEE HYO-SAN8 citations81

US8585917B2Nov 19, 2013

Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods

LEE HYO-SAN5 citations81

US8084367B2Dec 27, 2011

Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods

LEE HYO-SAN9 citations81

SEMES CO LTD

1 patent

US11004675B2May 11, 2021

Substrate cleaning composition, substrate treating method, and substrate treating apparatus

SEMES CO LTD2 citations71

LIM KWON-TAEK

1 patent

US8889563B2Nov 18, 2014

Method and apparatus for etching the silicon oxide layer of a semiconductor substrate

LIM KWON-TAEK3 citations53