Inventor
HWANG HA-SOO
KR4 patents
⚠️ This page may combine multiple inventors who share the name “HWANG HA-SOO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LEE HYO-SAN
3 patentsUS8790470B2Jul 29, 2014
Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods
LEE HYO-SAN8 citations81
US8585917B2Nov 19, 2013
Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods
LEE HYO-SAN5 citations81
US8084367B2Dec 27, 2011
Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods
LEE HYO-SAN9 citations81