Inventor
YUVARAJ HALDORAI
KR3 patents
Patents
3 patentsUS8790470B2Jul 29, 2014
Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods
LEE HYO-SAN8 citations81
US8585917B2Nov 19, 2013
Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods
LEE HYO-SAN5 citations81
US8084367B2Dec 27, 2011
Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods
LEE HYO-SAN9 citations81