Inventor

MIYAHARA HIROOMI

JP3 patents

Patents

3 patents

US8507312B2Aug 13, 2013

Photoelectric-conversion-device fabrication method

MIYAHARA HIROOMI1 citations45

US8394709B2Mar 12, 2013

Process for producing photovoltaic device and deposition apparatus

MIYAHARA HIROOMI0 citations43

US8263193B2Sep 11, 2012

Vacuum treatment method

MIYAHARA HIROOMI0 citations41