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Inventor
NAKAI TERUHISA
JP
2 patents
⚠️ This page may combine multiple inventors who share the name “NAKAI TERUHISA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
OKAGAWA HIROAKI
1 patent
US8946772B2
Feb 3, 2015
Substrate for epitaxial growth, process for manufacturing GaN-based semiconductor film, GaN-based semiconductor film, process for manufacturing GaN-based semiconductor light emitting element and GaN-based semiconductor light emitting element
OKAGAWA HIROAKI
8 citations
74
SEMICONDUCTOR ENERGY LAB
1 patent
US7875419B2
Jan 25, 2011
Method for removing resist pattern and method for manufacturing semiconductor device
SEMICONDUCTOR ENERGY LAB
4 citations
56