Inventor

MANGUM JOSHUA

US8 patents

⚠️ This page may combine multiple inventors who share the name “MANGUM JOSHUA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VEECO INSTR INC

3 patents

US10167571B2Jan 1, 2019

Wafer carrier having provisions for improving heating uniformity in chemical vapor deposition systems

VEECO INSTR INC2 citations68

US10262883B2Apr 16, 2019

Method for improving performance of a substrate carrier

VEECO INSTR INC0 citations51

US9269565B2Feb 23, 2016

Method for improving performance of a substrate carrier

VEECO INSTR INC0 citations51

BOGUSLAVSKIY VADIM

2 patents

US9653340B2May 16, 2017

Heated wafer carrier profiling

BOGUSLAVSKIY VADIM6 citations81

US8958061B2Feb 17, 2015

Heated wafer carrier profiling

BOGUSLAVSKIY VADIM2 citations60

MANGUM JOSHUA

2 patents

US8486726B2Jul 16, 2013

Method for improving performance of a substrate carrier

MANGUM JOSHUA12 citations80

US8815709B2Aug 26, 2014

Chemical vapor deposition with energy input

MANGUM JOSHUA2 citations59

MITROVIC BOJAN

1 patent

US8888919B2Nov 18, 2014

Wafer carrier with sloped edge

MITROVIC BOJAN3 citations61