Inventor
SCHMOTZER MICHAEL
US5 patents
Patents
5 patentsUS10087525B2Oct 2, 2018
Variable gap hard stop design
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US10600673B2Mar 24, 2020
Magnetic susceptor to baseplate seal
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US11791153B2Oct 17, 2023
Deposition of hafnium oxide within a high aspect ratio hole
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US12297533B2May 13, 2025
Liquid precursor vapor pressure control
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US12467140B2Nov 11, 2025
Showerhead assembly and components
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