Inventor
SCHLECHTE CHARLES
US3 patents
Patents
3 patentsUS11430643B2Aug 30, 2022
Quantification of processing chamber species by electron energy sweep
TOKYO ELECTRON LTD7 citations83
US12387910B2Aug 12, 2025
Plasma processing with broadband RF waveforms
TOKYO ELECTRON LTD0 citations60
US12020902B2Jun 25, 2024
Plasma processing with broadband RF waveforms
TOKYO ELECTRON LTD0 citations60