Inventor
TANG TSUN-CHENG
TW5 patents
⚠️ This page may combine multiple inventors who share the name “TANG TSUN-CHENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
4 patentsUS11567400B2Jan 31, 2023
Method of fabricating a photomask and method of inspecting a photomask
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations56
US11048163B2Jun 29, 2021
Inspection method of a photomask and an inspection system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations56
US11953448B2Apr 9, 2024
Method for defect inspection
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49
US12399440B2Aug 26, 2025
Lithography system and methods
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations47