Inventor
TAKAYAMA NAOHISA
JP7 patents
⚠️ This page may combine multiple inventors who share the name “TAKAYAMA NAOHISA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NEC CORP
4 patentsUS6674889B1Jan 6, 2004
Pattern inspection method and pattern inspection apparatus
NEC CORP27 citations90
US6400839B1Jun 4, 2002
Reticle inspecting apparatus capable of shortening an inspecting time
NEC CORP37 citations90
US6169603B1Jan 2, 2001
Compact reticle inspection system capable of inspecting a reticle with high accuracy and method of inspecting the same
NEC CORP35 citations90
US6330053B1Dec 11, 2001
Image alignment method in checking reticle pattern
NEC CORP14 citations71